| 摘要 |
PURPOSE:To improve the conversion efficiency of operation of a photoelectric conversion device by a method wherein a thin film of an oxide in which a part of lead and a part of chrome are substituted by specific metal elements is formed in a vacuum and the thin film is subjected to a heat treatment. CONSTITUTION:An oxide whose composition is expressed by (Pb1-xAx)5(Cr1-yBy) O8, wherein 0<x<0.95, 0<y<0.95, A denotes at least one Sr, Ba and Ca and B denotes at least one of W, Mn and Mo, is used as a target and a thin film of the oxide of the above composition is formed in a vacuum and then the thin film is subjected to a heat treatment in an atmosphere containing at least lead. With this constitution, a light transmitting (Pb0.7Sr0.3)5(Cr0.7W0.3)O8 thin film can be formed and, moreover, the uniform film with substantially no pores can be obtained. |
