发明名称 SUPPORTING TUBE HOLDING MECHANISM FOR SUCTION HEAD
摘要 PURPOSE:To improve the holding accuracy of a supporting tube holding mechanism by providing third and fourth rollers disposed at a predetermined interval opposed to first and second rollers pivotally secured to the flat surface of a holder at a predetermined interval linearly at upper and lower positions to always maintain the holding force of the suction head supporting tube constant. CONSTITUTION:A suction head supporting tube holding mechanism has first and second rollers 5, 7 pivotally secured by fixing means 3a, 3b such as pins or shafts disposed at a predetermined interval linearly at upper and lower positions on the flat surface of a holder 1. The mechanism has third and fourth rollers 9, 11 at a predetermined interval oppositely to the first and second rollers on the same flat surface. When the supporting tube 15 of the suction head 13 is formed in a square-sectional columnar shape, the first to fourth rollers have all V-shaped sectional supporting tube holding grooves 17. The holding grooves disposed on the rollers are not limited to the V-shape, but may employ an arbitrary shape in coincidence with the profile of the supporting tube.
申请公布号 JPS62179739(A) 申请公布日期 1987.08.06
申请号 JP19860021299 申请日期 1986.02.04
申请人 HITACHI ELECTRONICS ENG CO LTD 发明人 UNO MASAO
分类号 H01L21/677;B23P19/00;B23P19/04;H01L21/67;H01L21/68 主分类号 H01L21/677
代理机构 代理人
主权项
地址