CANTILEVERED BOAT-FREE SEMICONDUCTOR WAFER HANDLING SYSTEM,申请号EP19840113949-传众专利搜索

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发明名称	CANTILEVERED BOAT-FREE SEMICONDUCTOR WAFER HANDLING SYSTEM
摘要
申请公布号	EP0149750(A3)	申请公布日期	1987.08.05
申请号	EP19840113949	申请日期	1984.11.17
申请人	BETTER SEMICONDUCTOR PROCESSES (BSP)	发明人	TRESSLER, RICHARD ERNEST;STACH, JOSEPH;BAETEN, ROGER LEOPOLD
分类号	C30B31/14;(IPC1-7):C30B31/14	主分类号	C30B31/14
代理机构		代理人
主权项
地址

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