摘要 |
PURPOSE:To eliminate the need for a magnetic type speed detecting section by detecting a speed signal by back electromotive power generated in a linear motor coil. CONSTITUTION:A control circuit 1 outputs a control signal S2 to a linear-motor drive section 2 on the basis of a transfer command signal S1. The linear-motor drive section 2 outputs the signal of motor driving voltage VM to a linear motor 3 and a speed-signal detecting section 7 on the basis of the control signal S2. The linear motor 3 is driven by the motor driving voltage VM. A moving section 4 moved together with the linear motor 3 is detected by a position detector 5, and a positional feedback signal S4 is outputted to the control circuit 1. On the other hand, the speed-signal detecting section 7 outputs a speed feedback signal S5 to the control circuit 1 on the basis of the motor driving voltage VM. |