发明名称 |
Wafer probes. |
摘要 |
A wafer probe comprises a support member having an end region which is shaped to permit the end region to be brought into close proximity with a component under test. An amplifier is mounted on the support member at its end region. A conductive probe element is attached to the amplifier and is electrically connected to the amplifier's input terminal. A transmission line is connected to the amplifier's output terminal for transmitting signals from the amplifier to a measurement instrument.
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申请公布号 |
EP0230766(A1) |
申请公布日期 |
1987.08.05 |
申请号 |
EP19860309951 |
申请日期 |
1986.12.19 |
申请人 |
TEKTRONIX, INC. |
发明人 |
GLEASON, REED;STRID, ERIC W.;FLEGAL, ROBERT T.;MCCAMANT, ANGUS J. |
分类号 |
H01L21/66;G01R1/04;G01R1/067;G01R1/073;(IPC1-7):G01R1/067;G01R31/28 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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