PRODUCTION OF 1,2-QUINONEDIAZIDE COMPOUND

摘要

PURPOSE:To obtain the titled compound useful as a positive-type resist sensitive to radiation when used together with an alkali-soluble resin, by reacting a polyhydroxyl compound with an acylation agent, a sulfonylation agent and a 1,2-quinonediazidation agent. CONSTITUTION:The objective compound can be produced by reacting a part of hydroxyl groups of a polyhydroxyl compound with an acylation agent (e.g. acetyl chloride) and/or sulfonylation agent (e.g. methanesulfonic acid chloride) at 0-40 deg.C and reacting a part of or whole remaining hydroxyl group of the polyhydroxyl compound with e.g. a 1,2-quinonediazidation agent at 0-40 deg.C. The total amount of the acylation agent, sulfonylation agent and 1,2- quinonediazidation agent is >=0.3mol per 1g-equivalent of the hydroxyl group of the polyhydroxyl compound.