发明名称 |
Silicon-containing polyimides as oxygen etch stop and dual dielectric coatings. |
摘要 |
<p>The use of silicon-containing polyimide as an oxygen etch barrier in a metal lift-off process and as an oxygen etch stop in the fabrication of multi-layer metal structures is described. In practice, a lift-off layer (12) is applied on a substrate (10), followed by a layer of silicon-containing polyimide (14) and a layer of photoresist (16). The photoresist is lithographically patterned, and the developed image is transferred into the silicon-containing polyimide layer with a reactive ion etch using a CF₄/O₂ gas mixture. The pattern is transferred to the lift-off layer in a reactive ion etch process using oxygen. Subsequent blanket metal evaporation (22) followed by removal of the lift-off stencil results in the desired metal pattern on the substrate. In an alternate embodiment, the silicon-containing polyimide can be doped with a photoactive compound reducing the need for a separate photoresist imaging layer on the top. </p> |
申请公布号 |
EP0230615(A2) |
申请公布日期 |
1987.08.05 |
申请号 |
EP19860117617 |
申请日期 |
1986.12.18 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHACE, MARK STEPHEN;GUPTA, MANI RAM;KWONG, RANEE WAI-LING;SACHDEV, HARBANS SINGH;SACHDEV, KRISHNA GANDHI |
分类号 |
H01L21/302;G03F7/075;G03F7/09;H01L21/027;H01L21/28;H01L21/3065;H01L21/311;H01L21/312;H01L21/768 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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