| 发明名称 |
Samarium-promoted oxidation of silicon and gallium arsenide surfaces |
| 摘要 |
A method is provided for the oxidation of a silicon or gallium arsenide surface by depositing thereon a samarium overlayer comprising trivalent samarium prior to exposure of the surface to an oxidizing atmosphere.
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| 申请公布号 |
US4684541(A) |
申请公布日期 |
1987.08.04 |
| 申请号 |
US19860872889 |
申请日期 |
1986.06.11 |
| 申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
FRANCIOSI, ALFONSO |
| 分类号 |
H01L21/316;(IPC1-7):B05D5/12 |
主分类号 |
H01L21/316 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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