| 摘要 |
PURPOSE:To measure electrodes for a plurality of semiconductor chips simultaneously by forming the intermediate section of adjacent contact needles in grade separation structure and increasing the mounting density of the contact needles. CONSTITUTION:In a probing card, the intermediate sections of closely arranged contact needles 2, 8 are formed in a grade separation manner so as not to be mutually brought into contact with the intermediate sections of adjacently disposed contact needles. Consequently, the mounting density of the contact needles arranged in a fixed space is made remarkably higher than conventional devices. Accordingly, electrodes for a plurality of semiconductor chips are measured simultaneously.
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