| 摘要 |
PURPOSE:To realize an optimum condition of a high voltage lead wire itself, suppress heat generation, and generate ion beams efficiently, by setting the relation between the length of the high voltage lead wire in an ion beam device and the radius of the high voltage lead wire in a specific range. CONSTITUTION:Where the length of a high voltage lead wire 2 in an ion beam device is length l, and the radius of the lead wire is radius r, the lead wire is made in an optimum condition by setting the l and r to satisfy the formula: 10<-13(r<2>/l)<10<-6>. In other words, by selecting the values of length l and radius r of the high voltage lead wire in the ion beam device inside this specific range, the heat flowing-in from the outside is suppressed effectively, and the current density of the ion beams can be improved.
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