| 摘要 |
PURPOSE:To shorten the processing time of a substrate by moving a carrying unit which has two substrate holding mechanism reciprocally in a substrate carrying direction. CONSTITUTION:The carrying unit 800 which has load-side and unload-side chuck parts 802 and 806 as the two substrate holding mechanisms is reciprocated in the substrate carrying direction to supply a substrate to an inspection stage and discharge a substrate from the stage 200 at the same time. Then, while the stage 200 inspects a substrate, a substrate to be inspected next is held on one substrate holding mechanism of the unit 800, so the supply of a substrate to the stage 200 and the discharge of a substrate from the stage 200 are carried out efficiently in a short time. Further, the halt time of inspecting operation for the supply and discharge of substrates can be shortened, so the total substrate processing speed is improved.
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