| 摘要 |
PURPOSE:To facilitate fine adjustment for the flow rate by clamping a valve element comprising a piezoelectric element to which a piezoelectric laminated body is fixed between a valve body and a housing,and providing a control circuit having a mechanism for short-circuiting both terminals of the piezoelectric element. CONSTITUTION:A valve seat 7 having a valve hole 3 is projected toward the interior of a valve chest 11 between a valve body 1 and a housing 9. A valve element 8 comprises the so-called piezoelectric element having a piezoelectric laminated body 13 fixed to one surface of a diaphragm plate 12. There is provided a control circuit having a function for short-circuiting both terminals of the piezoelectric element forming the valve element 8. Therefore, the valve element is driven by the piezoelectric laminated body to perform fine adjustment for the flow rate of a fluid.
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