Gas-loaded pressure diaphragm

摘要

A gas-loaded diaphragm for exerting a predetermined pressure on a ceramic substrate during sintering to prevent x-y shrinkage. In the most preferred embodiment, the diaphragm comprises a gas-filled base composed of two opposing discs, and a substantially hollow gas-filled toroid container disposed around the perimeter of the opposing discs and communicating therewith to permit gas flow therebetween. This diaphragm is disposed in relation to a ceramic substrate-containing cell so that when it is heated to a desired temperature, the gas in the diaphragm expands and forces the two opposing discs apart to thereby exert a predetermined pressure on the ceramic substrate-containing cell.