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发明名称
GLASS-SUBSTRATE WASHER
摘要
申请公布号
JPS62176584(A)
申请公布日期
1987.08.03
申请号
JP19860014734
申请日期
1986.01.28
申请人
CANON INC
发明人
SHIOTANI MAKOTO;SAITOU MASAKO
分类号
B08B11/04
主分类号
B08B11/04
代理机构
代理人
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