| 摘要 |
PURPOSE:To make it possible to reasonably measure a distance and an angle even with respect to a surface to be measured like a mirror surface, by projecting the reflected light from the surface of be measured on a screen having a step part and further forming the transmitted light of the screen into an image on an image sensor. CONSTITUTION:Slit light is reflected from a surface 2 to be measured to be projected to screen elements 8a, 8b arranged so as to provide difference in level in the incident optical axis direction. The diffused transmitted lights of said elements are respectively formed into images on line sensors 10a, 10b arranged so that the bit arranging directions thereof cross the reflected lights at a right angle. Now, if the surface 2 has inclination in a thetaX-direction, the reflected lights appear on the elements 8a, 8b so as to have difference in level and are formed into images on the sensors 10a, 10b are they are. Then, the values at the light receiving positions are inspected to be outputted to CPU. The reading values on the sensors 10a, 10b of a reference surface 4 are preliminarily taken in CPU which in turn calculates the deviation of said detection values and the reading values. If this deviation is substituted for a predetermined formula to perform operation, the distance DELTAZ and angle beta between both surfaces 4, 2 are calculated. If the position data of the surface 4 is known, the position data of the surface 2 is also calculated.
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