STROBOSCOPIC ELECTRON BEAM DEVICE

摘要

PURPOSE:To accurately and speedily select IC operation wiring by making the repeating frequency for irradiating stroboscopic electron beam higher enough than IC operation clock frequency, detecting the time characteristic of the secondary electron signal at every irradiation position, and thereby obtaining the change. CONSTITUTION:A stroboscopic electron beam device 2 is controlled by a control circuit 1; a blanker 9 as well as a deflection coil 7 are operated by the branking pulse 102 of blanking pulse generating means 3; and the irradiation position of the electronic beam is thereby controlled. A wave detection IC 6 is operated by the operation clock 110 of a pulse generator 5 and the frequency of the pulse 102 is made higher enough then that of clock 110. The secondary electron signal 107 detected from a secondary electron detector 8 is input into a signal processor 4 and the dispersion value calculated is sent out so that the selection of operation wiring is performed. the selection of accurate and speedy IC operation wiring can be thus performed.