| 摘要 |
PURPOSE:To implement an RHET circuit, in which base resistance is decreased and its uniformity is improved, a current amplification factor is large and a conspicuous resonance tunneling effect is indicated, by arranging an emitter electrode, a base electrode and collector electrode in a laminated structure of gold germanium/gold/tungsten silicide in concentric circles, with the collector electrode located at the outermost side. CONSTITUTION:On a defined emitter layer 16, a base layer 14 and a collector layer 12, gold germanium, gold and tungsten silicide are sequentially laminated. Patterning is performed, and an emitter electrode 7, a base electrode 8 and a collector electrode 9 are patterned in concentric circles. In this pattern, the width of a path for a base current is expanded, and the uniformity in length is improved to a large extent than in a conventional example. The emitter electrode 7 is made to be a ring shape. A base electrode 8a is provided at the central position, and a base electrode 8b is provided at the outside. Then the uniformity of the length of the path of the base current is further improved. |
