MONOLITISKT INTEGRERAD HALVLEDARANORDNING INNEHALLANDE BIPOLERA SKIKTTRANSISTORER, CMOS- OCH DMOS-TRANSISTORER SAMT LAGLECKAGEDIODER OCH ETT FORFARANDE FOR FRAMSTELLNING AV DENSAMMA

摘要

Disclosed is a monolithic integrated semiconductor device which may contain specimens of seven different circuit components; namely: lateral N-MOS and lateral P-MOS transistors (CMOS), vertical N-DMOS and vertical P-DMOS transistors, vertical NPN bipolar transistors, vertical PNP bipolar transistors with isolated collector and low leakage junction diodes as well as a process for fabricating such a device.