| 摘要 |
PURPOSE:To make a coating layer uniform by providing a beam conversion optical system and converting a laser beam having a Gauss-like energy distribution to the beam having the energy distribution uniform in one direction on an irradiation surface. CONSTITUTION:The laser beam 1a oscillated from a laser oscillator 1 is transmitted by a beam transmission optical system. The transmitted beam 1a is converted to the laser beam having the energy distribution uniform in one direction on the irradiation surface by the beam conversion optical system consisting of a condenser lens 3, a polygonal mirror 13, etc. The converted laser beam 1a is made incident on a ceramics member 6 in a vacuum vessel 5 by a beam introducing optical system. The ceramics are evaporated therein and are deposited by evaporation on a substrate 9.
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