| 摘要 |
PURPOSE:To prevent both erroneous setting of processing time of a dry exforiation device and the stoppage of a production line by a method wherein the time control of a chemical reaction processing device, which has a communication function with the information control device provided outside, is performed based on the information of the processing time obtained from the information controlling device provided outside through communication. CONSTITUTION:A communication means 1 receives the information pertaining to the set time from a host computer, and transmits the information pertaining to the result of processing to the host computer. A control signal input-output means 2a becomes the interface of dry exforiation device and the main control part, it detects the condition of the dry exforiation device and outputs a control signal of the dry exforiation device. The set time information obtained by the communication means 1 is written in a memory means 4 by a time control device 3a, time is counted by the plasma chemical reaction starting signal of the dry exforiation device detected by the control signal input-output means 2a, the remaining time is computed by reading in the set time information from the memory means 4, the remaining time is written in the memory means 4, and when the remaining time becomes zero, the time control means gives instruction to the control signal input-output means 2a to input a time finishing signal.
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