| 摘要 |
PURPOSE:To keep flatness and to fix an object to be inspected with good accuracy even in case of detecting transmitted light by using a transparent flexible films and vacuum-sucking the object to be inspected to a table keeping the flatness. CONSTITUTION:A frame part 14 is provided surrounding a base plate 12 and the plate 12 and the transparent flexible films 13 are fitted airtightly and a channel for vacuum suction is formed. Then, the thin films 13 such as the Mylar films are laid in layers on the upper part of the object 2 to be inspected held on the plate 12 and vacuum-sucked by a sucker 4 connected with a suction port of a frame part 14. When the films 13 are vacuum-sucked in this way, the films 13 are stuck to the object 12 to be inspected and fixed uniformly by the air pressure. On this occasion, the air is impressed on the plate 12 from the vertical directions and the deformation is extremely small. Further, when the base plate is constituted of a transparent member such as a glass plate, and optical path is maintained extending over the whole area to be inspected by it and an optical axis is not changed because the deformation is small. |
