发明名称 ELECTROSTATIC ATTRACTION DEVICE
摘要 PURPOSE:To detect the existance of a specimen using a simple structure by a method wherein an electrode is used both as an electrode for electrostatic attraction and as an electrode for detecting specimens. CONSTITUTION:In electrostatic attraction of a specimen, switches 4a, b are switched over to an attraction voltage impressing DC power supply and a control part 5 side while electrodes 2a, 2b are impressed with specified voltage to provide a specimen 1 and electrodes 2a, 2b with electrostatic attraction for attracting and holding the specimen 1. The switches 4a, 4b are changed over to an electric capacity detector 6 side to check the existance of specimen 1. When the specimen 1 exists, the capacity checked by the electric capacity detector 6 is increased compared with the case when the specimen 1 does not exist making it feasible to discriminate the existance of specimen 1 by means of a discriminator 7.
申请公布号 JPS62174939(A) 申请公布日期 1987.07.31
申请号 JP19860015768 申请日期 1986.01.29
申请人 CANON INC 发明人 SATO YASUE
分类号 H01L21/683;B23Q3/15;H01L21/67;H01L21/68;H02N13/00 主分类号 H01L21/683
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