| 摘要 |
<p>A rapid-load system for loading a series of pallets into a sputtering apparatus. The system comprises a magazine (45) having a plurality of vertically spaced pallet supports. The magazine is removably supported in a load-in chamber of the sputtering apparatus by a chamber track assembly. A movable loading cart (73) in the system includes (a) a shiftable carriage (110), (b) a magazine track assembly (74), (c) a mechanism for shifting the support track assembly vertically with respect to the shiftable carriage, and (d) a transfer track assembly (127) for transferring the magazine from the support track assembly on the cart to the chamber track assembly within the load-in chamber.</p> |
