发明名称 POLISHING METHOD AND POLISHING DEVICE
摘要 PURPOSE:To secure a highly accurate polished surface of an optical element so easily without leaving any irregularity behind on the surface of a workpiece, by freely changing a revolving speed of a polishing tool in making it synchronize with a turning angle position of the workpiece, in case of polishing the optical element in particular. CONSTITUTION:After attaching a workpiece 12 and a polishing tool 28, feeding an abrasive, successively a drive motor 26, a feed motor 34 and another drive motor 30 are all energized by a processor controller 39. Among them, the drive motor 26 rotates a work turning shaft 25 via a gear 27. And, the feed motor 34 rotates in both c.w. and c.c.w. directions by an output signal out of a feed position detecting unit 37, reciprocating the polishing tool 28. Another drive motor 30 rotates so as to become the preset speed according to the angle position inputted in the processor controller 39 from a turning angle position detecting unit 41. With the abovementioned device, highly accurate polishing is performable without producing a step difference on the same zonal surface in the circumferential direction.
申请公布号 JPS62173167(A) 申请公布日期 1987.07.30
申请号 JP19860009988 申请日期 1986.01.22
申请人 CANON INC 发明人 NAKAMURA NOBUO;ANDO MANABU
分类号 B24B37/04;B24B37/07;B24B37/10 主分类号 B24B37/04
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