| 摘要 |
PURPOSE:To form a mark, a position thereof can be detected, and to improve the precision of drawing by detecting secondary electrons, reflected electrons or the like when electron beams are scanned to a laser mirror. CONSTITUTION:Marks 23, 24 receiving electron beams are fixed to removed sections in laser mirrors 21, 22 while the position of the upper surfaces of the marks are equalized to the drawing of a material to be drawn 13. The laser mirrors 21, 22 are irradiated by lasers in the X axis direction and the Y axis direction, thus measuring the position of an XY stage. Electron beams are scanned to the marks 23, 24 from the vertical direction to a paper surface, the positions of the marks are measured from signal waveforms by the reflected electrons, secondary electrons or the like of the electron beams, and process is repeated, thus detecting the quantities of drifts. Accordingly, the precision of drawing is improved.
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