| 摘要 |
PURPOSE:To permit always stable development by providing a regenerating means for regenerating a used developing soln. CONSTITUTION:The developing soln. 2 in a developing tank 1 is discharged from a discharge pipe 6 by a pump 5 and is introduced into the regenerating means 7. A supply pipe 8 connecting to a shower 4 is connected to the regenerating means and the regenerated developing soln. 2 is ejected from the shower 4 toward a work 3, by which the work is developed. The resist concn. in the developing soln. 2 usually increases gradually on repetitive use but the developing soln. 2 is circulated by the regenerating means 7 and since the resist components are removed therefrom by the regenerating means, the increase of the concn. of the resist component is limited and the developing soln. 2 having specified alkalinity is supplied from the shower 4. |
