| 摘要 |
PURPOSE:To accurately control a critical current of a Josephson junction element by contacting a first superconductor element and a second superconductor electrode through a tunnel barrier layer, and forming a second superconductor on a flat surface to microminiaturize a junction area and to enhance the accuracy. CONSTITUTION:After an insulating space 12 is formed on an insulator substrate 11, a first suerconductor electrode 13 is formed to cover the side and the partial upper surface of the spacer 12. After an insulator layer 14 and an insulating resin layer 15 are then sequentially formed, it is so etched as to completely remove the electrode 13 at least on the spacer 12 by an etch-back method. Then, a tunnel battier layer 16 is formed on the electrode 13, and a second superconductor 17 is formed to obtain a Josephson junction element. Thus, since the superconductor 17 can be formed on the flat surface, the dimensional accuracy is improved to microminiaturize the element.
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