| 摘要 |
PURPOSE:To stabilize a pulse laser in a simple and compact structure even if the number of laser beams to be combined is many and the pulse repetition is large by emitting a plurality of pulse laser beams toward a mirror of a rotatably driven polygonal mirror, and controlling the timing to emitting a light at the timing coincident on an optical axis with the same pulse laser beam reflected by the mirror. CONSTITUTION:A pulse laser beam 17 emitted from a first laser oscillator 15 is propagated through a reflecting mirror 13 while being controlled by a controller 20, incident to a mirror 12 of a polygonal mirror 11, and reflected toward an optical axis L. Then, after 1/2f hour, a second laser oscillator 16 is oscillated. A pulse laser beam 18 emitted from the oscillator 16 is propagated through a reflecting mirror 14 to be incident to the mirror 12. Since the mirror 12 is moved by the rotation of the mirror 11 at this time, it is similarly reflected in the optical axis L. Thus, the laser beams 17, 18 are similarly reflected in the axis L to be combined. |
