| 摘要 |
PURPOSE:To prevent the curling of transfer paper by providing a metallic squeegee in tight contact with a photosensitive body formed by an electron cyclotron resonance CVD method or the combination use of said method and glow discharge CVD method. CONSTITUTION:A non-product gas (argon, etc.) is supplied into a resonance space and a magnetic field is applied thereto by an air core coil; at the same time, a microwave is supplied to the resonance space to excite the argon and to release the same into a reaction space. A product gas (monosilane, etc.) is released to the reaction space to excite and activate the monosilane by argon so that the film is formed on a base body drum by the cyclotron resonance CVD method to obtain a photosensitive drum 30. The photosensitive drum 30 may be formed by making combination use of the above-mentioned method and the glow discharge CVD method. The metallic squeegee 32 is provided in tight contact with the photosensitive body 30 to prevent the curling of the transfer paper 31. The generation of the peeling and exfoliation of the coating is eliminated by forming the photosensitive body 30 by the cyclotron resonance CVD method, etc., and therefore, the curling of the transfer paper is prevented by providing the squeegee in tight contact with said body. |
