| 摘要 |
PURPOSE:To reduce the damage of an X-ray pickup window and an upper side electrode owing to the ions and the like from the plasma, by furnishing a penetrating hole to a pair of electrodes, with one end opened at the surface opposing to an electrode, and other end opened at the surface other than the opposing surface, linking to a vacuum. CONSTITUTION:At an upper side electrode 4, is furnished a penetrating hole 31, with one end opened at the surface opposing to the electrode part 6A of a lower electrode 6, at the lower side of the electrode part 4A, and the other end opened at the side of an electrode support 4B. In such a composition, from the plasma pinched between the electrodes, are radiated not only X-rays 9, but also a particle group including ions, electrons, and high temperature gases, produced at a high density in the process of the plasma collapse. While X-rays are emitted almost in equal directions to the circumference from the points of the plasma, the ions, electrons, high temperature gases, and the like are radiated along the center of the plasma axis. In this case, since the penetrating hole 31 is furnished at the upper side electrode 4 at the gas injection side in the plasma axis direction, the particle group generated from the pinched plasma 8 are absorbed in the direction not only to an X-ray pickup window 11, but also to the upper side electrode 4. |
