| 摘要 |
PURPOSE:To realize a local cleaning operation and improve a degree of cleanliness by a method wherein a cleaning unit for transporting or storing processed items to each of processing portions separately is arranged for each multi-stage processing device and cleaning air is separately supplied for each of cleaning units. CONSTITUTION:Compressed air 6 guided into a fan box 10 is cleaned through a filter 14 arranged as a cleaning mechanism at a lower surface of a fan box 10, thereafter is introduced into a cleaning area 16 as indicated by an arrow A. The cleaning area 16 has a floor surface formed by porous plate 18 and below the porous plate 18 are mounted a discharging duct 20 and a transporting mechanism 22 for use in transporting the processed items. Within the transporting mechanism 22 is placed a mounting block 24 for use in mounting the processed items extending from the porous plate 18 and to within the cleaning area 6. Semiconductor wafer or the like of the processed items are transported to the processing part together with a circuit board and can be stored. |
