| 摘要 |
PURPOSE:A treating machine, having respective means integrally laid on a movable frame capable of being freely carried in and out of a vacuum treating vessel therein and capable of stably processing a material even at a high speed without changing the vacuum degree and minimizing the vacuum treating vessel and having improved operability in changing over the grade. CONSTITUTION:In a plasma treating machine consisting of a vacuum treating vessel, a delivery means for a material to be treated, winding means, transfer means and plasma irradiation means contained in the treating vessel, the respective means are integrally laid on a movable frame capable of being freely carried in and out of the vessel. Driving source terminals, power source terminals and cooling water supply source terminals for operating the respective means laid on the frame are provided in the vessel and such terminals are detachably connected to the corresponding terminals corresponding to the respective means on the frame.
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