Ion generating device and method of manufacturing same

摘要

Ion generating device includes plural first electrodes extending in a first direction; plural second electrodes extending in the second direction to constitute a matrix; a third electrode so disposed that the second electrodes lie between the first electrodes and the third electrode, the third electrode having apertures corresponding to the matrix; a first dielectric member disposed between the first electrodes and the second electrodes; a second dielectric member disposed between the second electrodes and third electrode and having plural apertures corresponding to the matrix, which apertures each have a cross-sectional area generally decreasing toward the third electrode. A method of manufacturing the same includes the steps of providing an assembly constituted by the first electrodes, the second electrodes and the first dielectric member interposed therebetween; bonding a photosensitive sheet to the second electrodes and bonding a conductive sheet to the photosensitive sheet; forming apertures corresponding to the matrix in the conductive sheet; and exposing the photosensitive sheet with the conductive sheet having the apertures functioning as mask and then removing the exposed portions to form apertures in the photosensitive sheet to provide the second dielectric member.