| 摘要 |
PURPOSE:To enable miniaturizing of a cascade installation by arranging plural rotary drums in the inside of a casing so that these are directly adjacent to each another and providing the molecular pumps around each rotary drum. CONSTITUTION:A centrifugal separator 50 is constituted so that gaseous feed F can be separated into a product P and a weight W. Not only economical profit corresponding to such a fact that the centrifugal separator 50 is provided with plural rotary drums 32a, 32b, 32c to the inside of a single vacuum casing 52 is obtained, but also dense installation of the rotary drums is enabled and the installation area in a cascade installation can remarkably be reduced. Furthermore the number of the vacuum casing can remarkably be reduced and simplification of the cascade installation can be contrived and the length of each header can largely be drastically shortened.
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