| 摘要 |
PURPOSE:To suppress fluctuation of film thickness and form a thick film without spikes by providing slit type nozzle holes to a nozzle projected at the center of a susceptor. CONSTITUTION:A total of six slit type nozzle holes 32,... are provided, with intervals of 60 deg., at the upper part of nozzle body 31. Since the reaction gas can be supplied equally and stably over a wide range from the slit type nozzle hole 32..., fluctuation of the thickness of epitaxial layer in the direction of reaction gas flow can be suppressed. In case a baffle plate 23 is provided, large particles are adhered to the lower surface of the baffle plate and they splash and thereby generation of spikes is suddenly increased. In this case, however, no baffle plate is provided and therefore large size particles are not adhered and do not splash. Accordingly, generation of spikes is not so often even when the film becomes thick. Therefore a thick film can be formed.
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