| 摘要 |
PURPOSE:To enable the realization of stably-operated X-ray exposure by means of a construction wherein at least two or more storage rings being independent in terms of vacuum exhaustion of one another are provided for one beam line and a set of mask alignment equipment attached thereto. CONSTITUTION:An storage ring 100a is constructed of two parallel vacuum chambers 6a and 14. Two electron beams 5a and 15 are accumulated and turn round in two vacuum chambers 6a and 14 shaped in a polygonal ring and being independent completely as a vacuum system respectively. The electron beams 5a and 15 are curved by magnets7 and both of them emit synchrotron radiation rays 8a and 17, one of which is intercepted by gate valves 10a and 16 for vacuum. Since the electron beams 5a and 15 are designed to turn round simultaneously, a radiation ray from one storage ring 14 can be lead to a beam line through the gate valve 16 for vacuum opened, so as to continue an X-ray exposure operation, even when the other storage ring 6a becomes unusable due to trouble of the vacuum system or the like. Along with said operation continued, the storage ring 6a on the side being in trouble is restored by repair to the state in which the electron beams are made to turn round again at high speed regularly.
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