发明名称 |
Microscopic size, thermal conductivity type, air or gas absolute pressure sensor |
摘要 |
A microscopic size absolute pressure sensor for air or gas of the thermal conductivity type, a silicon nitride covered silicon microchip has an elongated V-groove anisotropically etched in the silicon with a heated silicon nitride bridge element extending over the surface of the V-groove.
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申请公布号 |
US4682503(A) |
申请公布日期 |
1987.07.28 |
申请号 |
US19860863892 |
申请日期 |
1986.05.16 |
申请人 |
HONEYWELL INC. |
发明人 |
HIGASHI, ROBERT E.;JAMES, STEVEN D.;JOHNSON, ROBERT G.;SATREN, ERNEST A. |
分类号 |
G01L11/00;G01L21/12;G01N27/18;(IPC1-7):G01L21/12 |
主分类号 |
G01L11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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