| 摘要 |
PURPOSE:To measure the potential of a signal wire accurately without being disturbed by a nose by a method wherein pads are provided on lead lines and formed so as to be top layers through contact holes and those pads are arranged with spacings more than 5mum from each other. CONSTITUTION:An insulating film 13 is formed on a substrate 11 and a predetermined region on the insulating film 13 is utilized as a signal wiring region 14 and, for instance, six Al layers (signal lines) 15a-15f of 2nd layer are formed in that region. Lead lines 16a-16f are lead out from the signal lines 15a-15f onto a diffused layer 12 through contact holes 17.... The lead lines 16a-16f are electrically connected to Al layers (pads) 19a-19f of 2nd layer through contact holes 18... which are provided above the diffused layer 12 and directly above the lead lines 16a-16f. The dimensions of those pads 19a-19f are 5mum and the pads 19a-19f are arranged in array with spacings a more than 5mum between adjacent pads.
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