| 摘要 |
PURPOSE:To facilitate manufacture of the above device and to enable positioning with high accuracy by drive with great degree of freedom by forming a driven member substantially like a polyhedron, disposing electromagnets opposite to the faces of the polyhedron, and controlling the supply of an electric current to the electromagnets to adjust the position of the polyhedron. CONSTITUTION:A driven member 1 to be positioned is formed substantially like a polyhedron, for example, a tetrahedron, and there is provided a driver 3 for floating and driving the driven member out of contact. The driver 3 is formed by disposing eight electromagnets 5, 7, 11, 13, 15, 17, 19 having electromagnetic attractive force with a fixed magnetic gap with the driven member 1 in such a manner that two electromagnets are opposite to the corner portion of each outersurface of the driven member 1. The electromagnets 5-19 are connected by a connecting member 29 made of non-magnetic material, a support 30 is fixed at the center of the driven member 1, and an electric current supplied to the electromagnets is controlled according to signals of position detectors A5-A19. Accordingly, the positioning device can be manufactured simply and easily, and positioning with high accuracy can be accomplished.
|
