| 摘要 |
PURPOSE:To synthesize uniformly mixed fine powder of AlN with Al4C3 having the same particle diameter, by using Ar as a gas for generating plasma and further N, H and NH3 as reaction gases and introducing metallic Al powder and C powder into a high-frequency induction hot plasma. CONSTITUTION:A quartz plasma generation tube 2 and reaction vessel 9 are evacuated with a gas discharge device 12 and Ar gas is introduced from a gas feed inlet 4. High frequency is passed through a high-frequency coil 1 to generate a plasma flame 5. A mixed gas of H, N and NH3 is introduced from a mixed gas feed inlet 8 and metallic Al powder premixed with a given amount of C powder is charged from a raw material feed inlet 14. The metallic Al powder and C powder are evaporated with the plasma flame 5 and the Al is mostly nitrided in the reaction vessel 9 and partially reacted with C and converted into Al4C3. The formed AlN and Al4C3 are mixed in a gaseous state, condensed and finely powdered during transfer to a powder collecting device 10 with a gas discharging device 11. The Al powder and C powder to be used have about >=99% purity and about <=30 mesh particle diameter and the content of Al4C3 in the mixed fine powder is adjusted to about 1-10wt%.
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