| 摘要 |
PURPOSE:To form a holeless film having improved adhesive strength by roughening the surface of a metallic pipe then coating the film thereon by vapor deposition. CONSTITUTION:About 10mum rough surface is formed by sandblasting, etc. on the surface (inside surface) 1a to be coated of the metallic pipe 1. The inside of the metallic pipe 1 is evacuated to a vacuum and while a reactive gas is supplied therein, a high-frequency discharge or glow discharge is generated between a gas introducing pipe 8 and the inside surface 1a of the metallic pipe. The reactive gas is converted to plasma by such discharge by which the resulted product of reaction is stuck onto the inside surface 1a of the metallic pipe. Since the inside surface 1a of the metallic pipe is roughened, the adhesive strength of the film is increased by a biting effect. The holeless good film is formed over the entire inside surface 1a of the metallic pipe when the metallic pipe is rotated.
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