摘要 |
PURPOSE:To enable to form, efficiently, a positive electrode for a X ray tube made of a target material with a desired form on a substrate, by forming a metal layer with high melting point on the substrate by means of flaming method in the atmosphere of inert gas. CONSTITUTION:A metal layer with high melting point such as W is formed by applying a flaming method under low pressure, on the surface of substrate made of Cu, Mo etc. After this sort of flaming process under low pressure has been completed, heat treatment of the substrate in which a metal layer with high melting point has been formed, at about 1,200-1,500 deg.C, can effectively raise crystal bonding power of target layer made of metal with high melting point. otherwise, crystal bonding power can be raised also by methods such as electron beam laser radiation to a metal layer with high melting point. In addition, a target layer made of metal with high melting point needs to be the flaming layer of which density ratio against theoretical one should be over 95%.
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