| 摘要 |
PURPOSE:To improve the reliability of a device and to reduce the weight and cost of the device by performing three-dimensional measurement without moving a sensor part. CONSTITUTION:Laser spot light A from a laser spot light generating device 1 is converged on an optical fiber 4 through an optical modulator 2 and a lens 3. Then, the spot light A projected from the optical fiber 4 is passed through a lens 5 and a polygon mirror 6 and further scanned by a polygon mirror 7 in an X-axis direction. Consequently, a body 8 to be measured is projected with the spot light A in a plane. The projected spot light A is reflected and scattered by the body 8 to be measured and the reflected light B is converged by a lens 9, so that the position of the reflected light is detected by a two-dimensional semiconductor position sensor 10. A scanner controller 11 which inputs signals from mirrors 6 and 7 calculates the projection angle of the spot light A and sends and angle signal to a signal processing part 12. Then, the processing part 12 calculates the depth of the object body 8, i.e. Z-axial distance from the irradiation angle of the spot light A and the reflection position signal from a semiconductor position sensor 10.
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