| 摘要 |
PURPOSE:To prevent trouble such as vacuum leakage in the stage of exchanging crucibles by installing the plural crucibles on a rotatable disk provided in an auxiliary chamber and permitting the exchange of the crucibles without the need for evacuating the inside of the auxiliary chamber to a vacuum at every crucible exchange. CONSTITUTION:This vapor deposition crucible exchanger is formed of a vacuum deposition chamber 10, a heating part 1 for the crucible 2 for vapor deposition provided in said chamber, the auxiliary chamber 11, the crucible receiving disk 3, a disk rotating device 4, a crucible taking out port 5 and a crucible lifting and supporting bar 7. The auxiliary chamber 11 is provided right under the vapor deposition chamber 10 where the crucible 2 is exchanged. The supporting bar 7 holds the crucible and moves upward and downward between the vapor deposition position A in the crucible heating part 1 and the standby position B of the disk 3.
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