| 摘要 |
PURPOSE:To obtain a uniform film by uniformly activating reaction gas, by generating uniform discharge between a plurality of rod-shaped electrodes radially mounted to a gas introducing means while reaction gas is uniformly diffused in a hermetically closed space from the gas introducing means. CONSTITUTION:After the amount interior of a metal pipe 1 has been hermetically closed, the metal pipe 1 is evacuated by a vacuum pump 12 while rotated by a rotary apparatus to exclude the atmosphere in the metal pipe 1. Next, high frequency discharge or glow discharge is generated between a gas introducing pipe 6 and a rod shaped electrode 8 by a discharge generator 10 while reaction gas is supplied in the gas introducing pipe 6 at low pressure from a supply source. The reaction gas radially diffused from a plurality of nozzles 7 of the gas introducing pipe by said discharge is activated to bring about thermal decomposition and synthetic reaction and the resulting reaction product is uniformly adhered to the inner surface of the metal pipe 1.
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