FINE ADJUSTMENT DEVICE FOR MICROMANIPULATOR

摘要

PURPOSE:To improve the moving smoothness and the responsiveness and then to improve the positioning accuracy and the reproducibility with the titled adjustment device, by using a displacement member to the fine adjustment device for micromanipulator of a microscope with piezoelectric ceramics combined into a bimorph structure. CONSTITUTION:The output of a distortion gauge S bonded to a bimorph displacement member 1, 2, 3 or 3' is fed back to the displacement target signal of the bimorph displacement member attached to the gauge S via a distortion amplifier 21. Then the difference signal is converted into the operational signal of an impression voltage generator 23 which produces the voltage to be applied to said displacement member by a P.I.D 22. Thus the desired displacement is always given to those members 1-3' by said feedback action.