| 摘要 |
PURPOSE:To improve the maintainability of a semiconductor manufacturing apparatus by stopping a vacuum evacuation hole of a spin shaft at the intermediate portion, forming a connecting hole in a housing, forming a vacuum sealing portion, and providing a pipe port for evacuating in vacuum on the outer surface. CONSTITUTION:When a vacuum pump 35 is driven to evacuate in vacuum by a piping system 31 connected with a pipe port 30 of a housing 17 as by an arrow B, vacuum pressure is supplied from the connecting hole 33 of a spin chuck 15 via a through hole 29 in the housing 17, a connecting hole 25, a vent hole 24 in a spin shaft 15 and a vacuum suction hole 20 to the upper surface recess 32 as designated by arrows C, D, E, and the chuck 15 attracts and holds the work 2 by vacuum. When a drive motor 18 is driven to rotate a rotational shaft 22 in the state that the work 2 is attracted by vacuum, a rotary driving force is transmitted to the shaft 16, also acted on the chuck 15, and the chuck 15 rotates while attracting by vacuum the work 2. The work 2 is processed as required in this state.
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