| 摘要 |
PURPOSE:To machine even such a workpiece that is refractory to cut in an accurate manner, by coating a thin film of hard carbon on the surface of a base material of a ceramics sintered body as thick as 0.5-50mu under decompression, and forming it into a cutting tool. CONSTITUTION:As fine ceramics material in use for a base material, such a sintered body that makes silicon nitride, zirconium oxide, aluminum oxide, etc., a main component is selected. For example, a surface of an Al2O3/TiC sintered compact tool on the market is grounded with diamond abrasive grains and then kept in a reaction vessel. Mixed gas whose H2:CH4 is regulated to the ratio of 100 to 1 is led into this reaction vessel at 40Torr. Then, with W filament, temperature of a base material surface is kept to 850 deg.C. With this constitution, hard carbon of a crystalline of 5mu is coated on the base material surface, thus a workpiece is accurately machined.
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