| 摘要 |
PURPOSE:To perform efficient and highly accurate polish machining by providing plural concentric grooves having the same center point as the rotating center of a surface plate so that the groove interval is decreased as the groove is separated from the center. CONSTITUTION:A laser rod (sample) 7 is fitted to a sample fitting jig 6 integrally made with a correction ring 5 and polished with a surface plate 1. Plural grooves 8 provided on the polishing face of this surface plate 1 are concentric circles around the center point of the rotary shaft 9 of the surface plate 1 and are notched so that the groove interval is decreased proportionally as the groove is separated from the center point. As a result, normal forces F applied to the polishing face of the surface plate 1 by plural samples 7 are made equal, thus the curvature of the surface plate 1 is not changed after polishing for a long time, and efficient and highly accurate polish machining can be performed.
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