| 摘要 |
PURPOSE:To efficiently feed sucked air on a wafer by providing two partition plates for dividing a space in a rotor substantially in parallel with each other, forming a vent chamber by the partition plates, and containing a cassette containing boxes at both sides in the vent chamber. CONSTITUTION:Partition plates 30a, 30b are provided substantially in parallel at an interval equal to or larger than the width of cassette containing boxes 16a, 16b in a rotor 8, a vent chamber 32 is formed, the plates 30a, 30b are so provided as to dispose the suction hole 6a of an upper cover 6 at the center of the chamber 32, the box 16a which contains a wafer 18 and cassettes 20a, 20b is contained at the position near the inner periphery of the rotor 8 at both sides of the chamber 32 to dehydrate and dry the wafer 18 and the cassettes 20a, 20b. Air sucked from the hole 6a is introduced substantially to the center of the chamber 32, an axial air flow generated by the high speed rotation of the rotor 8 is branched only in two directions of arrows A, B, increased as the rotor 8 rotates at high speed to remove the moisture of the surface of the wafer 18.
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